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dc.contributor.authorNguyễn Huỳnh Duy Khangvi
dc.date.accessioned2019-05-02T07:47:17Z-
dc.date.available2019-05-02T07:47:17Z-
dc.date.issued2015-
dc.identifier.urihttp://dlib.hcmue.edu.vn/handle/SPHCM/19971-
dc.titleDesign and simulation for optimal structure of cross type capacitive acceleration MEMS sensorvi
dcterms.modifiedTRUE-
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